The technology can be continuously operated under atmospheric pressure and is suitable to remove the micro particles in the surface of flat panel. CO2-Snow spraying module is equipped with pollution free, energy saving, water consumption saving and environmental friendly features, can provide a precision cleaning for fabricated metal product, precision machinery, electronics, optic-electronics and semi-conductor industries, such as the cleaning of wafer, LCD glasses, flat panel display, etc. and increase the technology and capabilities of domestic cleaning equipment manufacturers.
The dry cleaning process replaces the traditional solvent and water cleaning process to solve the substitute of HCFC cleaning solvent for industries and settle down the disposal of waste water and solvent prevalently confronted by industrial zone. Since dry cleaning process reduces the cleaning steps, the floor area occupied by required equipment is about 30% of water cleaning equipment that tremendously cuts down the space and maintenance cost of clean room and remarkably lowers or completely doesn’t allocate the budget in the disposal equipment of waste water and solvent. The hardware investment is estimated to decrease about more than 50%. The operational cost is about 80% of water cleaning or semi-water cleaning so that