MIRDC began in 2010 to develop the latest high-performance porous aerostatic bearing technologies in response to the industrial trend of using small-sized motion platen modules for precision manufacturing. The expected benefits include higher self-production rates for manufacturing processes and inspection/testing devices in Taiwan as well as established technologies for mid- to high-end, small-sized, sub-nano/nano class precision motion platens.
The smallest aerostatic platen so far developed by MIRDC has specifications as below: size - 230x150x66mm; movement - 60mm; load - 150N; and platen straightness - 0.8μm/60mm. MIRDC is dedicated to creating an infrastructure system, including motion platen performance-testing, precision measuring and application technology testing, which supports the development of the aerostatic motion platen industry, thus laying a solid foundation for critical motion platen technologies for Taiwan industries